金属激光损伤的光偏转法研究-声学专业论文.docxVIP

V4乏0 V 4乏0 6 O 1 摘 要 一{j l十多年来，激光对固体材料的损伤方面的研究有了很大的发展。 研究固体激光损伤的方法有很多，诸如Nomarski显微照相法，He-Ne 探测光反射方法，测量透射比的方法和光偏转方法等等√ 本文采用平行靶面激光束偏转方法研究了金属Cu和A1的激光 烧蚀。介绍了光偏转方法的原理，建立了光偏转检测实验装置。研究 了脉冲激光照射金属样品表面时，在周围空气中所产生的声波和冲击 波，测量了冲击波前锋的传播轨迹。用基于光偏转原理的三种方法测 量了不同表面粗糙度的金属样品的激光烧蚀阈值，并将三者进行了比 较。这三种方法分别根据光声能量、渡越时间和光偏转信号正峰值随 入射激光能量密度的变化来确定阈值。实验结果表明，用第一种方法 测得的阈值明显大于实际值，误差较大，而另外两种方法的结果则比 较接近实际值。并且，随着表面粗糙度的增大，烧蚀阈值呈现出明显 的递减趋势。 关键词：光偏转方法，烧蚀阈值，激光能量密度，声波，冲击波 Ab Ab stract In more than a decade，there has been a great progress in the study on laser damage of solid materials．Many methods were used in studyin2 laser damage of solid，such as Nomarski microphotography，the method of reflection of the He-Ne probe beam，the measurement of transmittance． and the laser beam deflection． In this thesis，the method of parallel laser beam deflectioJl is used to study the laser ablation of Cu and A1．The principle of laser beam deflection method is described，the experimental set．up for laser beam deflection measurement is constructed．The acoustic wave and the shock wave generated in ambient air by pulsed laser irradiating on the surface of metal samples are studied，the traj ectory of the wavefront of the shock wave iS measured．The laser ablation thresholds of metal samples with different roughness of surface are measured，using three methods which are based on the principle of laser beam deflection，and a comparison is made among them．These methods determine thresholds according to the variations of the photoacoustic energy，the transit time and the positive amplitude of laser beam deflection signal with the incident laser fluence respectively．The experimental results show that，the thresholds measured by use of the first method obviously exceed the actual values．and the error is large，while the results of the other two methods are close to the actual values．Moreover，with the increment of the roughness of surface． the ablation thresholds have evident decreasing trend． Key words：laser beam deflection method，ablation thres