回转精度检测系统的误差分析及仿真研究-机械电子工程专业论文.docxVIP

西安理 西安理工大学硕士学位论文 II II Abstract Title: ERROR ANALYSIS AND SIMULATION STUDY OF A ROTARY PRECISION DETECTION SYSTEM Major: Mechanical and Electronic Engineering Name: Jianli Nie Signature: JI /( μι Supervisor: Prof. Feng Gao Lect. Xingang Yang  Abstract  Signature: 马词仿p Signature: 前例问 Work performance directly affects 也e machining precision of p町ts，there are several reasons affect the machining accuracy of machine tools. Feed drive system is one of the main components of NC machine tool，it took on the linear and rot盯y axis positioning and cutting feed，and directly affect the machining accuracy ofNC machine tools. And feed shaft is one of the main parts of NC machine tools to realize feed movement ，so its accuracy is high and low will eventually affect the machining quality of parts. In this pape巳 study on the rotary precision detection system composed with the laser interferometer and continuous rotary reverse device using circular grating as a position detection device，further study on 由is system in the laser interferometer detection part and circular grating detection pa时， and their error sources of the measurement ，data processing ，simulation analysis respectively. Based on the rotation accuracy，measurement system was introduced in detail，firstly on the basis of the laser interferometer detection device as the object，discussed the source of each eηor in the measurement based on the Angle measuring instrument ，sets the device of the various components of the coordinate system，deduced observation model of meas田ement device by using coordinate transformation between parts，established a system in the optical path difference of measurement process simulation model according to the propagation path of laser interferometer light and geometrical optics theory，and observation model is proved to be correct through the simulation calculation model. Secondly the various error sources during measuring 町e analyzed based on the circular grating measurement sy