环式径向剪切干涉测量系统研究光学工程专业论文.docxVIP

哈尔滨工业大学工学硕士学位论文 哈尔滨工业大学工学硕士学位论文 - - II - Abstract Wavefront shearing interferometer is the interference which happen between the under test wavefront. It is the use of devices which can split the under test wavefront into two identical or similar wavefront, and he two wavefront is spatial coherence. They produce spatial displacement, and interference in the overlap zone. And compared with the traditional interferometer, such as Twyman-Green interferometer, the shearing interferometer not only high has sensitivity and high precision and non-contact, but also has unique advantages. Shearing inte