环氧树脂型探针卡的制作及高温测试关键技术研究-集成电路设计专业论文.docxVIP

PAGE PAGE 2 ABSTRACT The probe card is precision interface card that used to testing the function parameters of integrated circuit product before packaging, which between the automatic test system and integrated circuit chips. It is closely connected with the integrated circuit design and testing. Epoxy probe card is currently the most common use of probe card. But because of the restriction of domestic probe card technology level, manufacturing of epoxy probe card is not mature enough. Since the provisions company confidential, we cannot use some technology for reference and learning when we made probe card. At the same time, the probe card in high temperature test, also often encountered in abnormal probe mark and abnormal test results. This paper introduces the composition, types, the development process of the probe card, and its application in different fields. This paper taking the epoxy probe card’s manufacturing and using which made by the author for an example, described probe card’s production process in detail. At the same time, the author researched the practical problems that encountered in epoxy resin probe card’s making and using, especially for probe mark problem and probe card when using test temperature influence test result’s problem has carried on the detailed analysis, and puts forward the solution to these problems. KEY WORDS：Epoxy Probe Card, Manufacture, Probe Mark, High Temperature Test 目 录 第一章 绪论1 1.1 课题的研究背景1 1.2 国内外研究现状1 1.2.1 国内研究现状2 1.2.2 国外研究现状4 1.3 课题来源及主要研究工作5 1.3.1 课题来源5 1.3.2 主要研究工作6 第二章 探针卡的分类和比较7 2.1 探针卡的接口方式7 2.2 探针卡的分类和比较7 2.2.1 刀片式探针卡7 2.2.2 环氧树脂卡8 2.2.3 垂直探针卡12 2.2.4 探针卡的比较13 第三章 环氧树脂型探针卡的制作流程15 3.1 环氧树脂型探针卡的制作流程图15 3.2 布局设计15 3.3 聚酯薄膜打孔18 3.4 弯针18 3.5 探针投影19 3.6 制作环状物和支架20 3.7 摆针和烘烤20 3.8 焊接22 3.9 打磨23 3.10 校准和显微镜检测24 3.11 出货检测 24 第四章 环氧树脂型探针卡制作关键技术研究25 4.1 针痕的控制25 4.2 PCB 材料和设计的选择 27 4.3 漏电流28 4.4 探针材料的选择28 4.5 最大探针电流29 4.6 接触电阻问题30 4.7 触点压力31 4.8 扫雪式针痕32 4.9 可平面性33 第五章 环氧树脂型探针卡针痕异常与高温测试研