离子注入透明绝缘材料中纳米颗粒的合成、表征与调控-材料物理与化学专业毕业论文.docx

II II ABSTRACT Several researches were performed in order to fabricate nanoparticles (NPs) in the transparent dielectrics by means of ion implantation, as well as to control the size and spatial distributions of the embedded NPs. The main contents and results are given as follows. Polymethylmethacrylate (PMMA) slices were implanted with 30 keV carbon ions at different fluences, and their structure, photoluminescence (PL) and reflectivity were examined. A luminescent band with one peak could be detected from each sample, whose intensity did not vary in parallel with ion fluence. Such PL response was related to the formation of hydrogenated amorphous carbon nanoclusters and their evolution in configuration with ion fluence. The structural changes induced by ion implantation could be responsible for the fluence- and wavelength-dependent reflectivity of sample. CuZn alloy NPs embedded in SiO2 were fabricated by sequential implantation of 45 keV Cu and Zn ions at the same fluence of 1×1017 cm-2 together with subsequent annealing at 500 oC in nitrogen ambient. Such alloy NPs presented an intense surface plasmon resonance (SPR) peak at about 515 nm. After 600 °C annealing, the alloy NPs were decomposed, and only Cu NPs could be found in the substrate, which induced a SPR peak at about 574 nm. The weak PL peak around 558 nm detected from the annealed sample could be attributed to the excitation of Cu+ solutes. Nanometer metallic colloids were fabricated in SiO2 by dual implantation of 50 keV Zn and 35 keV Ag ions in different implantation sequences. In the case of Zn ions followed by Ag ions, Ag NPs were formed, which had smaller size, narrower size distribution and higher volume fraction as well as modified dielectric environment owing to the increased nucleation sites and the enhanced deposition process of Ag implants. As a result, the Zn first and then Ag implanted samples presented an intense SPR peak around 435 nm. Variation of Zn ion fluence only caused slight change