太阳能电池材料铜铟镓硒薄膜组织与性能研究.pdfVIP

太阳能电池材料铜铟镓硒薄膜组织与性能研究 摘 要 CIGS 薄膜太阳能电池以其廉价、高效、较强的稳定性和抗辐射性成为当今光 伏领域研究的热点之，倍受关注。然而制备高效 CIGS 电池的关键之一是要获得高 质量的 CIGS 多晶吸收薄膜。本文重点研究在玻璃基体上制备铜铟镓硒导电薄膜的 可能性。 实验采用直流磁控溅射装置，通过磁控溅射法，在普通无机玻璃衬底上制备铜 铟镓硒(CIGS)薄膜。通过改变溅射气压，硒化温度、时间等工艺参数，制备出不同 的CIGS 薄膜样品，然后利用 X 射线衍射仪（XRD ）、扫描式电子显微镜（SEM）、 划痕仪等仪器对薄膜的结构、形貌、性能以及薄膜和基体间的结合力进行了测试， 研究了制备工艺参数对薄膜组织和性能的影响。 关键词：CIGS 薄膜，磁控溅射，太阳能电池 I 太阳能电池材料铜铟镓硒薄膜组织与性能研究 Abstract CIGS is a promising material for thin-film solar cells .Much of current research is focusing on it .Because CIGS offer some advantage over other semiconductors in their application to photovoltaic technology ， such as high efficiency, stable and cost-effective .However, a key factor of fabricating high-efficiency CIGS solar cell is gaining high-quality CIGS polycrystalline thin films. Therefore, the thesis focuses on possibilities of the Preparation of CIGS thin film which are deposited by magnetron sputtering on the glass substrate. The experiment mainly used DC magnetron sputtering device and reactive sputtering to prepare CIGS thin film on general inorganic glass substrate. By changing sputtering pressure, selenium temperature, time and other conditions, the experiment prepared different CIGS thin film sample, using XRD, SEM, measuring instruments, such as scratches for making a test of the films organizational structure, morphology, performance and combination ability between film and substrate, and investigated the organization and performance of films for technical parameters. Keywords: CIGS thin film，Magnetron sputtering ，solar cells