测试系统继电器电阻值异常工程学分析及解决毕业论文.doc

诉讼关于测试系统的继电器电阻值异常的工程学分析及解决 摘 要 本文介绍了对于半导体分立器件电性参数测试系统的接触测试项目出 现异常所作的分析，将问题定位在测试系统内部继电器触点的电阻值异常。 而对其异常原因之分析和验证是本文的重点。最终将原因归结为测试系统 在对某些特定结构被测产品的测试过程中因为悬空的测试线路带有超过允 许范围的电荷，导致在之后的继电器的切换过程中对触点造成了伤害。本 文也提出了解决方案并通过实践验证该解决方案的可行性。所采用的解决 方案主要利用了测试系统本身的特点，将原来悬空的线路与设定为与高阻 状态的电源相连接，可以快速地释放电荷，从而避免对继电器触点的损伤。 另外对于无法设定为与高阻状态的电源相连接的情况，则在进行下一步的 测试前，通过专门的方法将电荷接地释放。此两种方法已经通过实际效果 的验证。  关键字:  电性参数测试系统,继电器,电阻值,电荷 ANALYSIS AND SOLUTION TO THE ABNORMAL RELAY RESISTANCE IN ELECTRONIC DEVICE TEST SYSTEM ABSTRACT The abnormal behavior of the contact test performed by the test system is analyzed in this thesis. It is identified that the problem arises from the abnormal resistance of the relay that connects the device under test to the tester. It is found by analysis and test that the abnormal resistance is caused by the charge accumulated on the line, which is floating when some devices with special structure are tested. The charge exceeding the limit of relay would hurt the contact of the relay during switching. A solution to this problem is provided in this thesis and verified by a series of experiments.  KEYWORD:  electronic parameter test system, relay, resistance, charge 图片目录  图 1 图 2 图 3 图 4 图 5 图 6 图 7 图 8 图 9 图 10 图 11 图 12 图 13 图 14 图 15 图 16 图 17 图 18 图 19 图 20 图 21 图 22 图 23 图 24 图 25 图 26 图 27 图 28  一个典型的半导体测试系统················································································ 2 接触表面中的有效接触面积················································································ 3 FORCE,SENSE 与测试设备的连接，接触采用 clamping 方式···························· 5 接触测试的原理图 ······························································································· 6 干簧管继电器示意图 ··························································································· 7 干簧管继电器的开合状态示意············································································ 7 干簧管继电器簧片动作的理论曲线 ···································································· 8 干簧管继电器簧片动作的实际曲线 ························