TiO2增透膜折射率调控工艺探究.pdfVIP

O28 TiO 增透膜折射率调控工艺研究 2 罗小兰 周灵平 朱家俊 彭坤 李德意 李绍禄 （湖南大学材料科学与工程学院，湖南长沙 410082） 摘要：采用电子束蒸发技术在玻璃及单晶硅衬底上制备TiO 薄膜，并分别引入离子束辅助轰击、斜角入射沉积等 2 工艺方法，研究了沉积工艺对薄膜折射率的调控作用。利用X射线衍射（XRD）、X射线光电子能谱（XPS）对薄膜 的组织结构、成分含量进行了表征，采用紫外可见光分光光度计测试了薄膜的光谱性能并计算其折射率。结果表 明，采用电子束蒸镀技术制备的TiO2 薄膜的折射率低于其块体值，通过降低氧气压、提高沉积速率或升高衬底温 度等工艺手段可有效提高TiO2 薄膜的折射率；离子束辅助轰击可使薄膜致密化，获得稳定的高折射率，具体变化 规律与离子源的辅助轰击离子种类、屏压及束流相关。利用斜角入射沉积则可通过控制薄膜生长角度和孔隙率明 显降低折射率，并有效改善薄膜的光谱性能。 关键词：TiO 薄膜；折射率；离子束辅助沉积；斜角沉积 2 Investigation on the regulation of refractive index of TiO films 2 prepared by different processes LUO Xiaolan, ZHOU Lingping, ZHU Jiajun, PENG Kun, Li Deyi, Li Shaolu (College of Materials Science and Engineering, Hunan University, Changsha 410082) Abstract: TiO films were prepared on glass and single crystal silicon by electron beam evaporation. 2 Ion assisted deposition (IAD) and oblique-angle deposition (OAD) were introduced to explore the regulation effect of deposition process on refractive index. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) were applied to analyze the crystal structure and component content of TiO2 films. UV-visible spectrophotometer was used to test the optical properties and then refractive indexes of films were calculated. Results reveal that the refractive index of TiO2 film prepared by electron beam evaporation is lower than the bulk’s. It can be improved effectively by decreasing O