CVD金刚石自支撑膜的力学性能.pdfVIP

~~ CVD 金刚石自支撑膜的力学性能 吕反修, 宋建华, 唐伟忠, 黑立富, 李成明, 陈广超 ( 北京科技大学材料科学与工程学院, 北京 100083) : CVD金刚石自支撑膜已经作为 一种崭新 工程材料出现, 其应用日益广泛, 急切需要对其力学行为 进行深入了解为此对有关金刚石膜 断裂强度和断裂韧度 研究, 以及金刚石膜 断裂机制进 行了详尽 论述简略介绍了金刚石膜 断裂强度和断裂韧度 测试方法, 给出了典型 测试数 据最后就如何提高金刚石膜 力学性能和更好地应用这种新型工程材料提出了建议 :金刚石自支撑膜; 力学性能; 断裂强度; 断裂韧度 : TB43 : A : 2011) M echan ical P roperties of CVD Freestanding D iam ond F ilm LU Fanxiu, SONG Jianhua, TANG W eizhong, HEI L ifu, LI Chengm ing, CHEN Guangchao ( School ofM aterials Science an Engineering, Un iversity of Science an Technology Beijing, Beijing 100083) Abs tract: A s an em erging bran new type of engineering material for a variety of mi portant h igh technology applica tions, a eep un erstan ing of themechan ical behavior of the freestan ing iamon film s has becom e an urgent task of vital mi portance. The purpose of th is review article is to present stateoftheart researches on the fracture strength an toughness, an the fracture mechan isms of this engineering materia.l T esting metho s of the fracture strength an fracture toughness of the freestan ing iamon film w ere intro uce briefly. Typ ical ataw ere presen te . Suggestions in the mi provement ofmechan ical properties an more safe an efficient use of th is k in of new en gineeringm aterialw ere iscusse . K ey w ord s: CVD freestan ing iamon film; mechan ical property; fracture strength; fracture toughness ), , ( (), ( Gyrotron w in ow), )() CO , MEM s, 2 , MEM s ( CVD ), IIa ( CVD , ), ,