基于超纯水电化学加工的扫描直写技术.pdfVIP

第 6卷第 4期 2∞8 年 7 月 纳米技术与精密工程 Nanotechnology and Precision Engineering 基子超纯水电化学加工的扫描直写技术 鲍坏谦 12，徐家文 2 Vo1.6 No.4 Jul. 2008 (1.山东科技大学机械电子工程学挠，青岛 266510; 2. 南京航空航天大学机电工程学院，南京 210016) 摘 要:为了充分发挥电化学加工以离子状态去除材料的加工机理，实现其在微细、精密，甚至是纳米加工领域中的 应用，针对绿色制造和微绍加工的需求，提出以超统水为电解液的微绚电化学加工方法.采用 fa 离子交换蹊促进超纯 水解离，提高电化学加工过程中电流密度:科用微探针作为工具龟板，通过数控机床控制运动轨迹保持与何极表面约 间1é恒定，以不网路径横向扫描工件，即可在工件fa极表面加工出 2D/3D 几何结构，并通过试验加工字母PW二ECM , 验证了起纯水作为也解溪进行电化学扫描主写加工技术的可行性. 关键词:电化学加工;超纯水;距离子交换摸:水解离 中望分类号: TG662 立献标志码:A 文章编号: 1672-6030 (2∞斟04-0312-04 Scan Direct Writing Technology ofECM in mtrapure Water BAOHuai-qi扭12 ， XU Jia, weEE2· ( 1. College of Mechanical 部d Electronic Engineeri吨， Sh扭dong University of Science andτechnology ， Qingd拍 266510 ， China; 2. College of Mechanical 姐d Electrical Engineeri吨， Nanjing University of Aeronautics andAstronautics , Nanjing 210016 , C挝na) Abstract: In order to adequately uti豆ze 也e machining mechanism of electrochemical machi函ng (ECM )in the miαb machining ,precision finishing.臼d even nano-fabrication. which c扭挖到ove one atom by one atom from the surface of the workpie碍，也e ECM in ultrapure water was presented aiming at the grl巳εnm姐ufacturing and microfabrication. Water dissc? ciation was accelerated under the function of cation exchange membrane to incr，臼se the current density in ECM 严。cess. It was validated that ECM in ulu吨ure water was appliedω20.βD shape maιhining in the anode s区旬出 ofwor与i∞e with a microprobe controlled by NC machine tool to keep a constant distance from anode surfaces with different horizontal scanning paths.As a result of technological test , Iet纪rs PW-ECM were machined ,which confums that the ECM sc四 direct writing technology ís feasible by taken ultrapure water as elec位ul严e. K牵ywords: electrochemical machining (ECM); ultrapure water; 臼.tion exchange mem放ane; wa能r diss∞iation 随着微电子学、材料学和精密机械学等学科的研 究逐步深入到微现领域，发展具备微米、纳米级精度 的微现结构、教器件的如工己成为推动学科发展的重 要手段.近年来，激光直写技术在散光学、MEMS 等 领域有重要应用.和[1m该技术可在元器件表面制作 各种散结构，以实现不同功能.高扫措隧道显散镜 (scanning tunneling mic