压电薄膜自适应变形微反射镜阵列研究.pdfVIP

拙咱哥·撒揣 第 18 卷第 12 期 2007 ~ 12 月 Journal of Optoelectronics • Laser Vo l. 18 No. 12 Dec.2007 压电薄膜臼适应变形微反射镜阵列研究祷 委迪怜\张巍，白剑，杨国光 (浙江大学光电系，现代光学仪器国家主重点实验室，浙江杭州 310027) 摘要z 介绍了自适应光学系统中的一种全新的基于内(Zr.r丁Îl-x 臼)(四川薄膜的微反射镜阵列。通过控制 PZT 薄膜两端电Æ实现微镜单元的微量形变，改变反射镜局部面形，校正畸变波丽的波袭，改善成像质最。该 方案在建掺杂 Si 片基底上依次制备 Pb丁i臼叩门、PZT，最后镀Al作为反射恼，形成 Si/ PT/PZT/剧的膜层结 构。对制备完全的试片在数字波丽干涉仪上进行了形变测试，尽管受到了薄膜热形变作用的影响，仍实现了约 1. 2μm 的可控形变，证明该方案用做自适应变形反射镜的可行性。 关键询:自适应光学;变形微反射镜阵列; Pb(Zrx Til-x向)(PZT)薄膜9 压电效应 中图分类号:0184 文献标识码:A 文章编号:1005-0086(2007) 12-1418-04 R四阳-ch on P:川è.based Deformable Micro-DÚrror Array in Adaptive Optics LU Di狲份， ZHANG Wei , BAI Jian , Y肚-JGGu吨uang (Department of Optical Engineering ,State Key Laboratory of Modem 向ticallnstrumentation ，刀lejiang University. Hangzhou 310027 ,China) Abstract:A novel defom1able micro-mirror array based on theωnverse piezoelectric effeet of PZT PbCZrx Th x 臼) thin films is introdc叫In this way ,we chωse the heavily doped silicon chip as the substrate ,lead titanate (PbTi仙，PT) as the buffer layer .Iead zir∞nate titanate (PbZrx Th-x仇，PZT) as the deform且ble layer and aluminum(AI) as the reflection sur- facιThe layer structure of Al/阳:T/PT/Si is realized. The thickness of PZT thin film varies acωrding to the applied volt. age ,which makes the unit of micr什mirror array deform and changes the partial surface shape of the mirror. The distorted wavefront and aberration isωrrected and the image quality is improved. Although the test isωmplicated by them1al expan- sion of the film ,the defom1ation measurement is carried out in the interferometer. About 1. 2μm ∞ntrollable deformation is realiz叫The testing result prov