单相vo 2 薄膜的制备及显微组织分析 - 钢铁钒钛.pdf

28 2 Vol. 28,No. 2 2007 5 IRON STEEL VANADIUM TITANIUM May 2007 VO 2 乔 威, 李智东, 赵昆渝, 李林德, 孟召标 ( , 650093) : V O , - V O 2 4 2 5 VO , 2 : VO ; ; V O ; - 2 2 4 + :TB3410614151 1 :A : 1004- 7638( 2007) 02- 0053- 04 Preparing Monophase VO Thin Film and Examining Its Microstructure 2 Qiao Wei, Li Zhi ong, Zhao Kunyu, Li Lin e, Meng Zhaobiao ( Kunming University of Science an Technology, Kunming 650093, Yunnan, China) Abstract:The VO thin film was ma e form V O ry gelatin film by two- step annealing practice. The V O 2 2 5 2 5 gelatin film was prepare by inorganic sol- gel metho from V O pow er an was rie in first annealing oper- 2 4 ation, then, the ry V O film was anneale in vacuum quartz pipe at 450 e an 480 e respectively, so the 2 5 VO2 thin film was obtaine . The microstructure of VO2 thin film was examine by XRD an photomicrography. The results show the VO thin film is monophase an annealing temperature has marke influence on the mi- 2 crostructure. Key ords:VO ; thin film; V O ; inorganic sol- gel metho 2 2 4