质点网格法电感耦合等离子体数学模型 - sunist.PDF

真 　空 　科 　学 　与 　技 　术 第 21 卷 　第 4 期 　　　　　　　　　　　　　　 ( ) 　　　　　　　　　　 294 VACUUM SCIENCE AND TECHNOLO GY CHINA 2001 年 7 月 质点网格法电感耦合等离子体数学模型 黄光周 　于继荣 　杨英杰 　刘雄英 (西安交通大学电子物理与器件教育部重点实验室 　西安 　710049 ; 华南理工大学电子与通信工程系 　广州 　510641) The Mathematical Model of Particle in Cell of the Inductively Coupled Plasma Huang Guangzhou , Yu Jirong , Yang Yingjie , Liu Xion gying ’ The Physics Elect ronic Device L aboratory ( a Key L ab . Directly U nder the Minist ry of Education) , Xi an Jiaotong U niversity , 710049 ; Depart ment of Elect ronic Com m unication Engineering , South China U niversity of Technology , Guangz hou , 510641 　　Abstract 　A mathematical model is developed to study the properties of the inductively coupled plasma sources ( ICPS) . The principle of the particle in cell ( PIC) is described in more detail. Calculation method of PIC is given. We suggest that only when PIC is combined with MonteCarlo collision (MCC) and sheath model ,can it more precisely simulate ICPS. Influence of different parame ters (the antenna location , number of turns of antenna and aspect ratio of reactor and so on) on plasma density distribution and elec tric field distribution is discussed. Based on the results of the simulation , the methods that may improve the uniformity of the plasma density are suggested. It may be of interest in the design of the high density planar plasma source. 　　Keywords 　mathematical model ,Particle in cell ,Plasma ,Inductively coupled ( ) ( ) 摘要 　建立了一个研究电感耦合等离子体源 ICPS 特性的数学模型 ,叙述了质