ic互连中缺陷检测方法及缺陷对电路可靠性影响-defect detection method in ic interconnection and its influence on circuit reliability.docx

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2018-05-28 发布于上海
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ic互连中缺陷检测方法及缺陷对电路可靠性影响-defect detection method in ic interconnection and its influence on circuit reliability.docx

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ic互连中缺陷检测方法及缺陷对电路可靠性影响-defect detection method in ic interconnection and its influence on circuit reliability

iiIC互连中的缺陷检测方法及缺陷对电路可靠性的影响detectedeasily.Theadvantageofthemethodisofitsaccuracyandhighrobustnessforillumination.Baseonthedefectdetection,35featuresofthedefectwhicharefromthepointofthedefectsize,shape,position,self-grayfeature,defectsaroundthegrayfeature,featuresrelationshipetcaredescribedindetail.Atthesametime,thespecificmathematicalexpressionsofthe35defectfeaturesaregiven.Investigationofthedefectfeaturesinthethesislaysthefoundationforfurtherstudyofdefects.DefectclassificationmethodsthatbasedonBP(BackPropagation)NeuralNetworkDefectClassificationanddefectgrayandthechangenumberofboundarygrayarepresented.Usingthemethods,defectscanbeclassifiedintofourtypes:shortcircuitdefect,opencircuitdefect,holedefectontheforegroundandredundancydefectonthebackground.12featuresarepickedoutfrom35featuresinBPnetworkclassification.Theexperimentshaveprovedthattheclassificationmethodproposedinthethesisisfasterandhashigheraccuracy.Inthemethoddefectgrayandofchangenumberoftheboundarygray,thedefectscanbeexactlyclassifiedaccordingtotheinformationofdefectgrayandsurroundinggraychanged.Firstly,itdoesnotneedpriorinformationorfeatureinformationofdefectandcomplicatedclassificationtechnology.Secondly,themethoddoesnotneedthedefectsamples.Thirdly,themethoddoesnotneedinformationofdefectfeature.Experimentshaveprovedthattheclassificationmethodproposedissimple,novel,fastandaccurate.WiththedevelopmentofICtechnology,moreandmoreinterconnectlayers,higherandhigherclockfrequencyofICdevices,signalintegrityissuesbecomemoreandmoreimportant.Inthethesis,thesignalcrosstalkduetoredundantobjectdefectofadjacentinterconnectshasbeenstudied.Thedefecthasbeenseenasasignalmodelofinterconnect.Thesignalcrosstalkofremoteandnear-endhasbeeninvestigated.Themethodcanbeusedtocalculatetheinfluenceofdefectoncrosstalkquantitatively.Thesignalreflectionofloseobjectdefectsandredundantobjectdefectsofinterconnectlinesareinvestigatedinthethesis.Thesignalisreflectedatimpedancediscontinuity,whichiscausedbythedefectsoftheinterconnectline.Thisnewmet