原创力文档采用力控制方法加工微沟槽结构的实验分析-experimental analysis of micro-groove structure processing by force control method.docxVIP
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采用力控制方法加工微沟槽结构的实验分析-experimental analysis of micro-groove structure processing by force control method
哈尔滨工业大学工学硕士学位论文AbstractDifferentfromtheconventionalscratchingmethod,thenormalforceisfeed-backcontrolledtomechanicallymachinethemicrogroovesinthepresentstudy.Duringtheprocess,thenormalforceiscontrolledtoaconstantvaluewhichissimilartothemechanismofthecommercialAtomicForceMicroscopebywhichtomeasurethenanoscalesampletopographythroughcontrollingthetip-sampleinteractionforce.Asimpleandlowcostmicromachiningdevicewhichcancontrolthenormalforceisestablished.ThisthesisaimstodosomeresearchonmicroAlandPMMAstructurescratchinginabigrangebythenewsystem.Themainlycontentsareasfollows:Firstly,themorphology,thede
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