硅锗薄膜材料的rfpecvd法制备及其在太阳电池中的应用-preparation of silicon germanium thin film material by rfecpvd method and its application in solar cells.docxVIP

THE RESEARCH OF SiGe:H ALLOY THIN FILM BY RF- PECVD AND ITS APPLICATION IN SOLAR CELLABSTRACTBecause of the high absorption coefficient and the narrow band gap(1.1~0.66eV) of silicon-germanium(SiGe) thin film，it has the ability to expand absorption of solar spectrum andimprove the conversion efficiency of the solar cells. And the SiGe thin films in the triple junction solar cells have good structure and have the ability to improve the efficiency and stability. So it has attracted a great deal of research interesting for solar cells application.The silicon-germanium thin films used in this st