射频板条co2激光器整形光路偏移补偿技术分析-analysis of offset compensation technology for shaping optical path of rf slab co2 laser.docxVIP

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射频板条co2激光器整形光路偏移补偿技术分析-analysis of offset compensation technology for shaping optical path of rf slab co2 laser.docx

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射频板条co2激光器整形光路偏移补偿技术分析-analysis of offset compensation technology for shaping optical path of rf slab co2 laser

AbstractTheoffsetsoftheoutputbeamleadedbytheheataberrationoftheRFslabCO2laserwilldirectlyaffectstabilityofthelaserpowerandthelasermodeandthenaffectthequalityoflasermaterialprocessing.Conventionalmirrorheatdistortioncompensationmethodadoptthermallycompensated,thecompensationmethodcanachievethepurposeofregulatingtheexternallightpath,butthelongerresponsetimeoftheprocesscannotmeettherequirementsofhigh-speedmachining.AgainsttheproblemofpowerattenuationandthepoormodecausedbymirrorheatdistortionofRFslabCO2laser,thispapercombinesthecharacteristicsoftheopticalshapingsystemdesignsanoutputbeammicro-adjustmentsystembasedontheadjustmentofturningmirror,themaincontentsofthispaperinclude:TheopticalsystemoftheRFslabCO2laserisstudiedinthisthesis.Theprincipleofthebeamshapingsystemwasanalysed.Thebeamshapingsystemachievesthepurposeoftransformationbyfocusingandcollimator;sphericalmirroroftheopticalshapingsystemachievesthecollimatorofthewaveguidedirectionandthefocusingoftheunstabledirection;throughaspatialfiltertofilteroutthesidelobeofthebeamintheunstabledirection;thedivergenceangleandthespotsizeofthebeamintheunstabledirectionmatchesthatofthewaveguidedirectionbyacylindricallens,finallythebeambecomingacircuitbeamwhichmatchestheindustryprocessing.Ascheme,turningmirrorrotationadjustment,isusedtoachievemicro-adjustmentoftheRFslabCO2laseroutput-beam.Thepaperdesignaprecisionturningmirroradjustment,usinghigh-precisionpiezoelectricceramiclocatorasmicro-displacementdrive,completingthepiezoelectricactuatorcircuitdesign,fittingthemachfunctionofthecontrolsingleofthesystem,designingthehardwarecircuitofthecontrolsingle,mechanicalstructurewhichcanachievetherotationoftheturningmirror.ThePLCHIMandcontroldriverisdesignedonthesupportingsoftware.HIMincludesacontrolsinglegivenwindowsandaoutputsingletimedetectionwindow,whichcanachievethecontrolanddetectionofthesystemcontrolsingles.SystemcontrolsinglesgeneratedbythePLC,thecontrolsignalsaretranslatedaccordingtothenumericalsizeofthelaserpowerdutyratioandthenthesy