TaN-基纳米复合膜和多层膜的微结构及性能研究 材料学专业论文.docxVIP

摘要 摘要 V V 排六方共存的混合结构；TaN/VN 多层膜的硬度和弹性模量在调制周期为 0.67nm 时最大，分别为 31.8 和 410.3GPa；其中硬度比按照混合法则计算得出的理论值 高出 11GPa；随着调制周期的增加，硬度逐渐降低；TaN/VN 多层膜的摩擦系数 随着调制周期的增加而降低；较低的摩擦系数和一定的韧性，使得 TaN/VN 多层 膜的耐磨性能优于 TaN 和 VN 单层膜；在调制周期为 24nm 时，由于磨痕中生成 了具有自润滑效应的 V2O5 相以及较优的韧性，从而使此时的薄膜具有最低的摩 擦系数和磨损率。 关键词：TaN 单层膜；TaVN 复合膜；TaMoN 复合膜；TaN/VN 多层膜；微结构； 力学性能；摩擦磨损性能 Ab Abstract 江苏科技大学工学硕士学位论文 江苏科技大学工学硕士学位论文 III III IV IV ABSTRACT A series of TaN monolayer films deposited with deiffertent bias voltages, a series of TaVN composite films with different V content, a series of TaMoN films with different Mo content, a series of TaN/VN multilayer films with different modulation periods were prepared by magnetron sputtering technique. The surface topography, microstructures, mechanical properties, friction and wear properties at different temperatures of the films were measured by AFM, XRD, SEM and equipped EDS, nanoindentation, ball-on-disc tribometer and equipped 3-D profilometer. The study on TaN deposited with different bias voltages showed that the structure of TaN was composed of cubic TaN and orthorhombic Ta4N, while the preferred orientation changed with the bias voltage. When the bias voltage was 80V, the hardness and modulus of the films reached to peak value, 30.103GPa and 317.048GPa, respectively, and the interfacial adhesion was the best. At room temperature, the friction coefficients of the films ranged between 0.64 and 0.68. At high temperatures, the friction coefficient of the films decreased as the temperature increased. This work discusses the wear mode and the reason of different friction coefficient at different temperatures based on the surface morphology and phases of wear tracks formed at different temperatures. The study on TaVN composite films showed that the microstructure of TaVN films took the face-centred cubic structure. With increasing V content, the preferential orientation changed from (111) to (200), and the hardness increased to the peak value (32.3GPa) and then decreased. At r