差动电容式加速度传感器测量系统的研究与应用-控制理论与控制工程专业论文.docxVIP

Subject : Research and Application of the Differential Capacitive Accelerometer Measurement System Specialty : Control Theory and Control Engineering Name : Wang Xiaoxin (Signature) Instructor : Wang Zaiying (Signature) ABSTRACT As an important technical foundation of modern science and technology, sensor technology is a high-tech with remarkable and rapid development in todays world, and it is one of the most important symbol of the science and technology development and the overall strength of a national. As an important branch of the sensor, acceleration sensor receives more and more attention. The sensitive structure of capacitive accelerometer has been the key design of accelerometer because of its high sensitivity, low power consumption, small temperature drift, simple structure, non-intrusive installation, etc. Based on the principle of variable clearance differential capacitive acceleration sensor and the sensor output signal characteristics, this paper designed and produced a modified relaxation oscillation measurement circuit, for the measurement of small capacitance change. The test result of this circuit shown it has good performance in sensitivity, resolution, non-linearity, zero drift,etc. For the output signal of the measuring circuit, then designed data acquisition and processing system which used DSP as its core, for achieving the function about processing measurement data and uploading data to PC.By designing of LabVIEW virtual instrument software, it realized the serial data reading, the combination display of the text and curve, the storage of measurement data, etc. Finally, the result of calibration and actual experiments for the entire measurement system shown that the designed capacitive accelerometer measurement system was running well, acceleration of the measured object can be displayed real-time and accurately. This measuring system can be widely used in industrial automation, automotive airbags, medical equipment, and other fields,