磁悬浮微动台解耦及控制研究-机械制造及其自动化专业论文.docxVIP

摘要 摘要 I I 摘 要 磁悬浮微动台作为光刻机粗精叠层超精密运动平台的关键部件之一，其运动 行程小、精度要求高，同时其运动及定位精度将直接决定晶圆在光刻工艺中质量 的优劣。本文以一种采用新型重力补偿结构的磁悬浮微动台为对象，针对其各个 自由度运动间的耦合进行研究，并在精确解耦的基础上进行控制器设计，满足磁 悬浮微动台的运动性能指标。 首先，考虑当微动台运动造成驱动音圈电机永磁磁钢相对于线圈偏移将引起 驱动电磁力的变化，由于电磁力不同将引起非平衡驱动，同时各自由度将产生耦 合，因此建立磁悬浮微动台驱动音圈电机的电磁场和电磁力的解析模型，并通过 仿真和实验验证解析模型的正确性。 其次，重力平衡组件以及驱动电机在安装、制造、装配等环节中不可避免存 在误差，造成实际模型与理论模型的不一致，从而使得基于理论模型的驱动力分 配将引起各自由度间的耦合以及驱动力的误差，通过仿真验证分析结果。 再次，针对磁悬浮微动台时域和频域性能指标，在对其模型辨识基础上设计 相位超前-滞后反馈控制器对其进行运动控制，同时，为减小高频段柔性振荡对位 置误差的放大，采用低通滤波器对高频段的能量进行衰减，并通过磁悬浮微动台 的运动控制实验进行验证。 最后，建立磁悬浮微动台的六自由度输入输出模型，结合最小二乘法提出一 种离线计算电流分配系数的方法对其解耦，并通过实验对其进行了验证，同时提 出采用递推最小二乘法在线计算电流分配系数进行解耦。 关键词：磁悬浮微动台，电磁力建模，模型误差，耦合，控制器 AB ABSTRACT II II ABSTRACT Magnetic suspension fine stage is a key component of coarse-fine laminated ultra precision motion stage in lithography machine with short-stroke and high precision, furthermore its movement and positioning accuracy will directly determine the quality of the wafer in photolithography process. This paper have conducted the research in view of the coupling between the different degrees of freedom of motion based on a magnetic suspension fine stage with a novel gravity compensation structure, and the controller have been designed based on exact decoupling to meet the movement performances of the magnetic suspension fine stage. Firstly, considering the electromagnetic force will change when the coil of voice coil motor moves in the air gap of permanent magnets, so the difference of electromagnetic force will cause the imbalanced drive, and each degree of freedom will coupling, thus I have established an analytical model of electromagnetic density flux and electromagnetic force of the coil in magnetic suspension fine stage, and the simulations and experiments have verified the correctness of the analytical model. Secondly, installation, manufacturing and assembly error are inevitably exist in the gravity balance components and drive motor, and will causes inconsistence bettween the actual model and theory model. So m