环境对金属有机双层膜传质影响的研究-物理电子学专业论文.docxVIP

摘要在新型电子器件的制造、材料的有机涂层防护、器件的失效分析与可靠性评估等 摘要 在新型电子器件的制造、材料的有机涂层防护、器件的失效分析与可靠性评估等 诸多应用领域中，均涉及到元素传质问题。由于近年来新型电子器件中金属．有机体 系的广泛应用，金属有机膜层传质成为一个重要的科学问题，引起研究者的广泛兴趣。 本文研究具有电双稳特性的Ag-TCNQ双层膜体系在络合反应中的特殊传质规律，系 统考察了湿度和氧对传质过程的影响，揭示了其中的特殊现象和规律，深入探讨了传 质过程的机制。所得结果对于金属有机双层膜的快速制备，相关膜层的失效分析具有 重要指导作用，主要结果如下： (1)采用双源交替蒸发的方法，利用透射光谱作定标，得到化学配比良好的 Ag·TCNQ双层膜体系。 (2)采用不同条件(大气，饱和盐溶液，真空等)控制环境中湿度和氧气等参 数，用透射光谱和颜色变化观测Ag．TCNQ双层膜传质变化情况。发现氧对传质基本 无影响，而湿度对传质有显著的加速作用，用电化学反应对该加速现象给出理论解 释，指出在湿条件下，传质由干条件下的固体化学扩散机制转变为水溶液中的电化学 机制。 (3)在湿度控制的Ag·TCNQ双层膜传质研究中，发现了传质速度与湿度的反 比规律，从表面吸附的相关理论提出了湿度控制传质模型，证明湿环境加速传质的控 制步骤为水分子在有机膜上的吸附。 (4)对不同膜厚样品进行传质研究中，用毛细吸附理论推算出Ag．TCNQ膜表 面等效孔半径为15 A，且基本不随膜厚改变。 关键词：Ag．TCNQ，双层膜，湿度，传质 分类号：0484．3 AbstractElementary Abstract Elementary transport is involved in many fields，including manufacturing ofnovel electrical devices，organic coating layer ofmaterials，failure analysis and reliability of devices．With the progress and wide use ofmetal—organic systems，transport in such kind of film layers becomes more and more important and attracted much attention in recent years． In this paper,an electrical bi—stable Ag-TCNQ bi—layer film system WaS studied， investigation of humidity and oxygen on the special transport behavior was carried out during its complex reaction、the special phenomena and roles wcre revealed and the mechanism oftransport process was discussed．The results Can be useful guidance to fast preparation and failure analysis ofrelevant films．The main results are as foflows： (1)Ag-TCNQ bi—layer film with good stoichiometry is obtained by alternately vacuum deposition ofAg and TCNQ with measurement oftransmission spectrum． (2)The conditions ofhumidity and oxygen were controlled using different methods(atmosphere，supersaturated salt solution，vacuulTI chamber and on)，the transport process ofAg--TCNQ bi--layer was monitored by transmission spectra and color change．It WaS found that oxygen almost has influence on transport，yet environmental humidity call greatly accelerated the transport process wit