基于psd方法的kdp晶体超光滑表面表征技术研究机械制造及其自动化专业论文.docxVIP

哈尔滨工业大学工学硕士学位论文 哈尔滨工业大学工学硕士学位论文 Abstract On the high-energy multi-path Inertial Confinement Fusion solid laser driver, laser weapon and other advanced equipment, only the large-size non-linear electrical-optical crystal KDP with high accuracy can be used to make optical frequency multiplication transition and Pockel’s switch parts. Presently, KDP crystal is often machined using Single Point Diamond Turning technology. But it is found that the KDP crystal surfaces machined by SPDT method are strongly anisotropic and micro-scale wavenesses formed. The number of KDP crystal laser damage threshold has a direct relation-ship with roughness. Conventional roughness characterization method doesn’t contain vertical and horizontal surface spacial information distribution. It is an important work to analyzes machined surface special frequency of KDP crystal. In this thesis power spectral density (PSD) and continuous wavelet transform 2-D (CWT2D) will be used together to achieve the extraction of the spacial frequency. Calculate the impact degree of the particular spacial frequency on the surface morphology. Find out what is the main factors impact the quality of the surface. Reconstruct the particular spacial frequency on the initial surface by CWT2D to proof the result of PSD analysis. It helps us to find out the relationship between the micro-scale wavenesses and the number of KDP crystal laser damage threshold. PSD is more adaptational than roughness in aspect of different measure scales and cycles. In the end achieve the KDP crystal cutting experiment on the ultra-precision machine tools. Use the CCI WLI to detect the KDP crystal machined surface. Find out the relationship between the machining parameters and the spacial frequency on the surface by PSD. Reconstruct the particular spacial frequency on the initial surface by CWT2D. It helps us to find out the relationship between the micro-scale wavenesses and the machining parameters. Keywords KDP crystal, Power spectral