室温气体传感器的实现机理及性能研究-微电子学与固体电子学专业论文.docxVIP

室温气体传感器的实现机理及性能研究扑绝缘体的内部绝缘特性决定了它的表面金属态在导电性能中的主导作用，理论 室温气体传感器的实现机理及性能研究 扑绝缘体的内部绝缘特性决定了它的表面金属态在导电性能中的主导作用，理论 上会有更快的响应速度，因此本文的第五章我们探索了这一新奇的量子态物质在 超快速气体分子检测中的应用，以便在降低传感器的工作温度的同时获得较快的 响应速度。 关键词：界面，平衡，电荷转移 II 万方数据 摘要英文摘要 摘要 英文摘要 Reducing the operating temperature of gas sensors is extremely important for ensuring security in presence of explosive gases，improving battery life of portable and werable sensors and construcing wireless sensor networks with high reliability．But for a conventional metal oxide semiconductor gas sensor,it is a systematic project．The most essential task of any quantitative detection is to construct a measurable and unstable equilibrium which can be easily broken by the target．If a gas sensor is regarded as an isolated physical system，a lower temperature means a more stable state，which can hardly be broken by the target gas molecules．Although ultraviolet activation has been proved as an effective method to lower the working temperature of gas sensors， the ultraviolet light sources are also energy-intensive devices． The ultimate aim of this work is to realize fast detection of gas molecules with high sensitivity and selectivity．In the introduction part，we tried our best to interpret some important issues involved in the gas detection process based on fundamental laws ofphysics and chemistry,such as how the adsorption ofgas molecules on a solid occurs， why charge transfer will take place and how it will affect the conducting properties of the solid．In Chapter 2 and Chapter 3，it is found that the current passing through a semiconductor sensing film depends strongly on the surface band bending caused by gas adsorption．the Schottky barrier formed at the metal—semiconductor interface and the regional depletion induced by noble metal decoration．With the decrease in size and increase in complexity of sensing materials，the interracial effects are becoming ever more interdisciplinary．Physics，chemistry and materials science blend to encourage cross-pollinating