基于MINITAB15软件平台的小面积管芯免中测研究-软件工程专业论文.docxVIP

I I PAGE PAGE IV 摘 要 随着绿色照明工程的推广，节能灯和荧光灯的应用越来越广泛，电子镇流器 的用量也随之而增大[15]。本文根据现有深爱公司设备工艺条件，进行工程设计、 优化实验，应用一定的统计工具和方法对提高产品合格率，达到 0.83mm*0.83mm 管芯免中测。 本文属于工程设计类论文，全文围绕现有设备及工艺路线，结合技术中心改 版、排版等优化手段，分阶段、分工序、有计划的进行相关实验，所取得的大量 数据应用 Minitab15 软件进行统计分析，通过材料、扩散、光刻、CVD 和金属化 共同努力，合格率有了明显的提高，特别是 CVD 在改善氮化硅同片均匀性上的改 善，对该项目有着至关重要的影响。最终我们项目组在大量实验数据证明下，我 们确定了几个重要的影响因素：1）光刻版质量，严格控制每一批免测片做片所使 用的光刻版质量；2）专人专设备，对放大倍数一致性、表面 SIPOS 膜层一致性和 铝层一致性有较大的改善作用；3）各个工序一次性通过概念，通过培训提高一次 性通过率，降低返工；4）单独的不打点抽测方案，通过测量系统分析软件验证中 测系统，优化 1/4 抽测、并向 1/9 抽测过渡；5）固化设计方案，形成作业指导书。 经过努力，项目组最终基本完成了公司所设立的目标，封装合格率能够稳定 在 96.5%以上。 关键词：合格率，免中测，工艺优化，测量系统，工程设计 ABSTRACT As the green-lighting project’s extension,the energy-saving fluorescent lamps are used more widely, and the more electric ballast is also in the same time. The thesis seeks to enhance products quality by project design,optimized experiment combining with statistics methods based on existing equipment and processes. The study of non-test on the product 4083 which size is 0.83*0.83 is accomplished. The thesis is about project-design. The related experiments have been taken with several stages and process step by step, joining modified mask and arrange their orders. A lot of datas that gained in the works are statisticed and analyed by Minitab 15 software. The yield is enhanced remarkablly through improving material、diffusion、 lithography、CVD and matlelize, especially Si3N4 thickness consistancy on the same piece. Finally some important factors are optimized with experimental results: 1)photomask perfection； Each photomasks used for non-test wafer must be controled strictly. 2) Appointed operator and equipment；which play important roles during improving consistancy in Hfe、SIPOS film and Aluminum layer thickness. 3) No reworking in every procedure; decreasing the reworking rate through training the operators. 4)Independent part-test without doting; verify the test instrument using measurement system analysis software , (inproveing)practicing 1/4 test u