基于化学腐蚀方法制作的特种光纤珐珀传感器-光学工程专业论文.docxVIP

AbstractAbs仃act Abstract Abs仃act Ever since the appreance of fiber-optic sensors，mey have become 011e of the most important branches of sensors and have been intensively investigated due to its high realibility,immunity to electromagnetic interference，capacity of multiplexing，low attenuation and long distance transmission．Among various fiber sens01s，fiber Fabry-Perot ffrv)interferometric SenSOrS al e one of the most promising fiber sensors and have been widely used in a large number of applications． Various micromachining techniques，including femtosecond laser micromachining method，1 57nm excimer laser micromachining method and chemical etching method， have been developed for fabricating miniature FFP SenSOrs．Chemical etching method has the advantages of low cost,easy fabrication and available for mass production．But this method also has several shortcomings，such as short Cavity,poor mechanical strength,low flatness and poor repeatability． In this paper,the concentration and component of the etching solution ar e optimized to enhance the etching rate of various optical fiber cores．The influence of the discharge intensity,discharge duration and number of discharges is investigated to improve the performance of FFP sensors．We fabricate several kinds of FFP SerIsors based 011 chemically etching special optical fibers．The main work is podded as follows： 1．Micro extrinsic Fabry-Perot interferometric SenSOrs(MEFPI)are fabricated by chemically etching Er-doped fibers、7l，itll mixed Hydrochloric(HCl)and Hydrofluoric (HF)acid and fusion splicing．Compared、7l，itll MEFPI sensors fabricated by etched single mode fibers，the sensor performance is greatly improved by the chemical reaction between HCI acid and doped Er203．A maximum visibility of-24dB is obtained, comparable to that of MEFPI sensors fabricated by excimer lasers．Our MEFPI sensor has hi．出mechanical strength aS the etching rate difference between fiber core and cladding is enlarged．Preliminary results indicate that this