溶胶–凝胶SiO2减反膜的表面修饰和抗污染特性-硅酸盐学报.PDF

· 2054 · 硅 酸 盐 学 报 2010 年 第 38 卷第 11 期 硅 酸 盐 学 报 Vol. 38 ，No. 11 2 0 1 0 年 1 1 月 JOURNAL OF THE CHINESE CERAMIC SOCIETY November ，2010 溶胶–凝胶SiO2 减反膜的表面修饰和抗污染特性 1 1,2 1 沈 军 ，刘 源 ，李晓光 (1. 同济大学波耳固体物理研究所，上海市特殊人工微结构材料与技术重点实验室，上海 200092 ； 2. 上海理工大学理学院，上海 200090) 摘 要：采用溶胶–凝胶法制备了用于高功率激光装置的 SiO 减反射膜，并在室温条件下采用气相法对该薄膜进行表面修饰。结果表明：修饰后薄膜 2 的疏水性能、激光损伤阈值均有明显提高；其在大气环境下的耐候性与普通薄膜相当，但对有机污染物的抗性明显提高；经六甲基二硅胺烷修饰、氨 气氛及热处理后的薄膜表现出对有机烷类良好的抗污染性能。 关键词：溶胶–凝胶；二氧化硅减反薄膜；表面修饰；抗污染性；硅烷化 中图分类号：O484.4 文献标志码：A 文章编号：0454–5648(2010)11–2054–05 SURFACE MODIFICATION AND CONTAMINATION RESISTANCE OF SOL–GEL SiO2 DERIVED ANTIREFLECTIVE COATINGS SHEN Jun1，LIU Yuan 1,2，LI Xiaoguang 1 (1. Pohl Institute of Solid State Physics, Shanghai Key Laboratory of Special Microstructure Materials and Technology, Tongji Uni- versity, Shanghai 200092; 2. College of Science, University of Shanghai for Science and Technology, Shanghai 200090, China) Abstract: The SiO2 antireflective (AR) coatings for high peak power laser systems were prepared using sol–gel method, and vapor- phase treated at room temperature with organosilanes such as hexamethyldisilazane (HMDS) and trimethylchlorosilane (TMCS). The results show that the post-treated sol–gel AR coatings are more hydrophobic than standard TEOS-based sol–gel AR coatings and pre- sented an increase in their laser induced damage threshold. The post-treated coatings are as durable as normal SiO2 AR coatings. But their resistance to contamination by a series of volatile organic com