声表面波直线型超声电机的研究-精密机械及精密仪器专业论文.docxVIP

——一 ——一 !鱼型堂垫查叁堂雯±堡奎 Abstract Surface acoustic ultrasonic linear motor uses the surface acoustic wave(SAWl in high frequency and gets the stepping motion by direct friction drive．Compared with the traditional ultrasonic motors(USM)，Surface acoustic ultrasonic linear motor has the excellence of high resolation(nm order)，high output force，high speed and high energy density,etc．In the addition，because of the application of the SAW technology, this motor is easy to realize minimization and to integrate with semiconductors．So is an excellent micro—driver which has wide application field．And i t wi l 1 be the most representative new—type motor in 21 century． Surface acoustic ultrasonic linear motor is basically made up of three parts：the stator,the IDT and the slider．When applying high—frequency ac on the IDT,the SAW is generated in the surface of the piezoelectric materials．The slider comes under the pre-load and presses on the stator．This makes the stator and the slider rub between each other．This friction drives the slider to move in beeline in one or two dimensions． In this thesis，the Surface acoustic ultrasonic linear motor’S theory and construction are proposed first．Then the ANSYS software is used tO do simulation analysis of the motors’parts and to optimize every part’S construction parameters．The relation between the parameters of the structure and the properties of the motor outputs is discussed in this thesis．Finally a new—type motor is designed which is improved， small—enough，unlimited in stroke method and moves in two．dimension． 巾心科学技术人学硕十论文 巾心科学技术人学硕十论文 Y 615958 致 谢 我在中国科学技术大学学习的整个过程中，得到了导师邬玉亭副教授和褚家 如教授的悉心关怀和精心指导，两位老师以他们渊博的理论知识和严谨的治学态 度，给我树立了作为一位科技工作者的榜样。我从他们身上不仅学到了从事科研 工作的理论知识和实践经验，更重要的是学到了许多做人的道理，使我终身受益。 借此机会，向两位老师表示衷心的感19}，特别感谢邬老师从学习方面到生活方面 给予的无微不至的关怀。 我所在的智能微系统研究室是一个具有浓厚的学术环境、优越的科研条件的 实验室。通过在实验室短短的三年学习，使得我对微电子系统领域的前沿工作有 了广泛的综合的认识，并做了一定的工作。感谢实验室的各位师兄弟们，给予我 很多宝贵的建议和热情的帮助。 隶经作髫、导；0两熬 钿垒文公布 中国科学技术人学硕二f：论文第一章绪论 中