微陀螺仪研究.pdfVIP

MEMS 微陀螺仪研究进展 成宇翔, 张卫平, 陈文元, 崔　峰, 刘　武, 吴校生 (上海交通 学 微纳科学技术研究院 微米/纳米加工技术国家级重点实验室, 上海　20 0240 ) :回顾了MEMS 微陀螺仪的研究进展, 简单介绍了MEMS 微陀螺仪的市场应用。 微陀螺仪 是MEMS 器件中非常重要的一类器件。 它的运用已经从单纯的航空领域逐渐转向汽车、 消费电 子行业等低端市场, 这意味着微陀螺仪除了传统意义上的高精度高稳定性的要求, 也可以向低精 度商品化发展。 传统的振动式陀螺, 由于原理的局限性和加工技术的限制, 很难达到战术级和惯 性级的要求。 导航级集成微陀螺 (NGIMG)项目建议使用其他途径, 以减少器件的可移动部件 和降低工艺难度, 从而提高其精度和抗干扰能力。 各种设计方法近年来层出不穷, 其中悬浮转子 式微陀螺是目前精度最高的陀螺仪, 微集成光学式陀螺也将在未来一段时间拥有巨 的研究潜力 和发展空间。 :微电子机械系统 (MEMS);惯性传感器;微陀螺仪;零偏漂移;角随机游走;悬浮转 子式微陀螺 :TH703 　:A 　:1671-477 6 (20 11)05-027 7-09 Research Development of MEMS Micro-Gyroscopes Cheng Yuxiang, Zhang Weiping, Chen Wenyuan, Cui Feng, Liu Wu, Wu Xiaosheng (N a tiona l K ey L abora tory of Nano/M icro F abr ica tion T echno logy , R es earch Institu te of M icro/ N an o S cience and Techno logy , S hang ha i J iao Tong Un iversity , S hang ha i 20 02 40, Ch ina ) Abstract:The research progress of MEMS icro-gyroscopes are reviewed.The arket applica- tions of MEMS icro-gyroscopes are introduced briefly.Micro gyroscopes play a significant role in the MEMS devices.Fro aviation fields, its application has gradually shifted to the low-end arket, such as auto obile and consu er electronics, which eans that instead of thehigh preci- sion and stability, co ercialization is another develop ent direction.As the li itation of the principle and the fabrication technology, the traditional vibrating gyroscopes can hardly reach the tactical grade and the inertial grade.The NGIMG progra , supported by DARPA, suggests to use other ethods to reduce flexible co ponents, decrease the processing difficulty and i prove the precision and antija ing capability.In the recent years, endless varieties of designs are pro- posed.The icro levitated rotational gy