基于相敏扫频OCT的镜头可靠性前后无损检测方法.pdfVIP

Abstract

Reliabilitytestingisanimportantpartoflensmoduleprocessingandproduction,

andonlythelensmodulepassingthereliabilitytestingcanbemassproduced.Afterthe

reliabilitytest,therelativepositionoftheinnerlensmaychange,whichwillaffectthe

imagingperformanceofthelensmodule.Therefore,itisofgreatsignificanceto

quantitativelydetectthechangeofrelativepositionoflensmodulebeforeandafter

reliabilitytest.Mostoftheexistingdetectionmethodsarebasedonthesurfacedetection

oflens,thesemethodscanonlydetectonesurfaceatatime,andthespeedisslow.

Opticalcoherencetomography(OCT)isathree-dimensionalimagingtechnologywith

depthresolution.Ithastheadvantagesofnon-invasive,highresolutionandreal-time

imaging,soithasthedevelopmentprospectofnon-destructivetestingbeforeandafter

lensreliability.Inthispaper,basedonopticalcoherencetomography,the

nondestructivetestingmethodoflensreliabilityisstudied

AphasesensitivesweptsourceOCTimagingsystemisdesignedandbuilt.The

axialresolutionis20μm,themeasuringrangeis11mm,andthelinescanningspeedis

100kHz.Itcanrealizethereal-timeOCTimagingoffulllensinthelensmodule.By

usingthefiberBragggrating(FBG)onthelightsourcetocalibratethespecific

wavelength,andcalculatingthespectralshiftthroughthephaseerroratthespecific

position,thephasecorrectionofthesweptsourceOCTsystemiscarriedout,andthe

phasestabilityofthefrequencysweepingOCTsystemisrealized.

Amultilensdisplacementmeasurementmethodbasedonphaseinformationis

proposed,whichbreaksthroughthelimitationofresolutionofOCTsystem,including

displacementmeasurementmethodbasedondepthdomainphase,measurementrange

expansionmethodbasedonspect