MEMS机油压力传感器可靠性研究的论文.pdfVIP

MEMS机油压力传感器可靠性研究 关荣锋 (河南理工大学材料科学与工程学院，河南焦作454003) 摘要：研究了封装工艺对传感器可靠性的影响。分析和实验结果表明，机油压力传感器封装材料 及各个工艺步骤都会影响传感器的性能和可靠性。贴片胶性能不能满足可靠性要求，会引起传感 器信号漂移和高温不稳定·l生；引线键合强度不够，在工作中会断裂；硅油化学稳定和耐温性能不够 好．会造成传感器高温输出信号不稳定，硅油中的空气和杂质会造成传感器零点输出偏大，使传感 嚣的精度下降等。 关键词：微机电系统；封装技术；压力传感器；机油压力；可靠性 Researchonthe ofMEMSOilPressureSensor Reliability G[／AN Rong-feng (School Scienceand 454003，China) ofMaterialsEngineering．HenanPolytechnicUniversity．Jiaozuo Abstract：TheoftheMEMSoil sensorsusedtomeasureoil ofauto— reliability pressure pressure motive wasresearched．Theand resultsdemonstratethatthe engine analyzingexperimental pac- materialsand havealleffecton ofthe sensor．Ifthe kaging packagingprocess reliabilitypressure of cannot the willmakethesensor’sout— performancesbondingglues satisfyrequirements，this and Ifthewire isnot wireswill putsignalshiftingunstabilizingo bodingstrengthenough，the inthesensors the break work．Ifsiliconoil andresist maybe chemistrystability temperatureper- formaneearenot fine．thiswillmakethesensor’s unstabilizationandthe quite outputsignal big- zero arewillaffectthesensor’a ger outputsignals．Thesequestions longreliability． Keywords：MEMS；packagingtechnology；pressuresensor；oilpressure；relability 要传感器，其可靠性直接关系到汽车和人的安全性。 1引言