a pumping actuator implemented on a pcb substrate by employing water electrolysis：采用水电解法实现在印刷电路板上实现的抽油机.pdfVIP

Microelectronic Engineering 95 (2012) 65–70 Contents lists available at SciVerse ScienceDirect Microelectronic Engineering journal homepage: www.else /locate/mee A pumping actuator implemented on a PCB substrate by employing water electrolysis D.N. Pagonis a,⇑, A. Petropoulos b, G. Kaltsas b a Department of Naval Architecture, TEI of Athens, 12210 Athens, Greece b Department of Electronics, TEI of Athens, 12210 Athens, Greece a r t i c l e i n f o a b s t r a c t Article history: This work concerns the development of a novel actuator based on water electrolysis for pumping use in Received 28 November 2011 microfluidic systems. The electrolysis is performed inside a confined reservoir integrated on a PCB sub- Received in revised form 21 January 2012 strate which is connected to a microchannel. During the electrolysis process, the generated gases within Accepted 7 February 2012 the enclosed structure lead to a significant pressure increase which can be employed in order to move a Available online 16 February 2012 liquid inside the microchannel. In order to demonstrate the device’s principle of operation, water is dri- ven through a meander microchannel structure which is connected at the output of an appropriate Keywords: micro-tank; the effectiveness of employing electrolysis as an actuating principle has been investigated Electrolysis by mon