Optical Triangulation-Based Microtopographic Inspection of？Surfaces 英文参考文献.docVIP

Sensors 2012, 12, 4399-4420; doi:10.3390/s120404399 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Review Optical Triangulation-Based Microtopographic Inspection of Surfaces Manuel F. M. Costa Centro de Física, Universidade do Minho, Campus de Gualtar, Braga 4710-057, Portugal; E-Mail: mfcosta@fisica.uminho.pt; Tel.: +351-253-604-070; Fax: +351-253-604-061 Received: 21 February 2012; in revised form: 22 March 2012 / Accepted: 28 March 2012 / Published: 29 March 2012 Abstract: The non-invasive inspection of surfaces is a major issue in a wide variety of industries and research laboratories. The vast and increasing range of surface types, tolerance requirements and measurement constraints demanded during the last decades represents a major research effort in the development of new methods, systems and metrological strategies. The discreet dimensional evaluation the rugometric characterization and the profilometric inspection seem to be insufficient in many instances. The full microtopographic inspection has became a common requirement. Among the different systems developed, optical methods have the most important role and among those triangulation-based ones have gained a major status thanks to their flexibility, reliability and robustness. In this communication we will provide a brief historical review on the development of optical triangulation application to the dimensional inspection of objects and surfaces and on the work done at the Microtopography Laboratory of the Physics Department of the University of Minho, Portugal, in the development of methods and systems of optical triangulation-based microtopographic inspection of surfaces. Keywords: microtopography; optical triangulation; non-invasive inspection; rugometry 1. Introduction The non-invasive dimensional characterization of objects and surface is an issue of u