超高阻隔膜制备工艺现状及市场发展吴常良.pdf

34 5 第 卷 第 期 真 空 科 学 与 技 术 学 报 2014 5 CHINESE JOUＲNAL OF VACUUM SCIENCE AND TECHNOLOGY 年 月 543 超高阻隔膜制备工艺现状及市场发展 * 吴常良 李茜茜 李 丽 黄尚鸿 (中国乐凯集团有限公司 保定 07 1054) Synthesis Technologies and Economic Impact of Ultra-High Barrier Thin Films * Wu Changliang ，Li Xiqian ，Li Li ，Huang Shanghong (China Lucky Group Corp oration ，Baoding 07 1054 ，China) Abstract The latest development of flexible and transparent ，ultra-high barrier films was reviewed in a thought provoking way． Its wide applications ，such as the flexible electronic packaging materials ，solar cell encapsulating ma- terials ，flexible organic light emitting diodes ，electronic paper ，light-weight vacuum insulation panels ，etc ，have been attracting an increased research interest． The discussions focused on :i)Its synthesis techniques ，including polymer multilayer (PML)process ，plasma enhanced chemical vapor deposition (PECVD)，atomic layer deposition (ALD)， dual-target reactive magnetron sputtering ，and lamination of composites ;ii)Characterization of its microstructures ， iii)Its water vapor and oxygen transmission rate (WVTＲ and OTＲ)． In addition ，its development trends ，potential applications and market prospectswere also briefly discussed． We suggest that reduction of its high fabrication cost be a challenging project for researchers． Keywords Barrier film ，Silicon oxide ，Vacuum preparation process ，Market 、 ， 、 、 摘要 柔性 透明超高阻隔膜在高附加值领域上的需求越来越多 如有机薄膜太阳能电池