脉冲加热金属薄膜之热反应分析analysis of thermal - 远东科技大学.pdfVIP

遠東學報第二十六卷第二期 脈衝加熱金屬薄膜之熱反應分析 Analysis of Thermal Response in Metal Film with Pulse Heating 朱弋鵬 遠東科技大學機械系講師 林欽澤 遠東科技大學電腦應用工程系講師 劉國基 遠東科技大學機械系教授 摘 要 金屬薄膜受至極短脈衝雷射加熱時，其內的熱反應時間將短至可與聲子 和電子的熱平衡時間相比較。於此情況之下，電子溫度和金屬晶格溫度需分 開界定，固體晶格和電子氣處於熱平衡的傳統假設會失去其適用性。極短脈 衝雷射對金屬薄膜所引致的熱損傷，非源於高溫，而是因不平衡加熱的極速 變形。本文以微觀熱傳遞模式分析金屬薄膜受至極短脈衝雷射加熱的熱傳 遞，進而瞭解內部的快速熱彈性行為。 關鍵詞 ：極短脈衝加熱、非平衡熱傳遞、快速熱彈性 247 遠東學報第二十六卷第二期 I-Peng Chu, Instructor, Department of Mechanical Engineering, Far East University Chin-Tse Lin, Instructor, Department of Computer Application Engineering, Far East University Kuo-Chi Liu, Professor, Department of Mechanical Engineering, Far East University Abstract As the heat energy deposition is extremely fast, the response time of the film is comparable to the phonon-electron thermalization time. Under such situations, heat transfer in the electron gas and metal lattice needs to be considered separately and classical heat conduction models assuming thermal equilibrium between solid lattice and electron gas lose validity. Note that ultrafast damage induced by the ultrashort pulses is intrinsically different from that induced by the long-pulse or continuous lasers. Thermal damage induced by ultrashort pulses occurs after the heating pulse is over and is the thermal deformation. To know thermal damage of metal films that are heated with the high rate heating, this paper uses the mic