CCD靶面与安装定位面夹角误差的光学检测方法.pdf

34 4 Vol.34 No.4 2012 4 Infrared Technology Apr. 2012 CCD 130033 CCD CCD CCD CCD CCD CCD TH751 A 1001-8891(2011)04-0213-04 Optical Measurement Method of Angle Error between CCD Target SurfacesAnd Locating Faces WANG Zhi (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China) Abstract With the increasing demand of the large-scale array CCD, the angle error between the target surface and mechanical installing surface is rather big in some new researched CCDs, but there is no relevant data in CCD product specifications. This paper introduces a non-contact optical measuring method, detailed explains the principle, operation method and data processing with an example. As a measuring method for new CCD parameters, this method avoids concurrence of real image and virtual image after the optical system was completely adjusted. Key words CCD target surfacemachine locating faceoptical depth of focusoptics measurement 0 1 CCD 20 70 CCD CCD 1.1 CCD CCD , CC CCD [1,2]1 CCD CCD CCD CCD CCD CCD