square diaphragm cmut capacitance calculation using a new deflection shape function正方形膜片cmut电容计算使用新的偏转形状函数.pdf

Hindawi Publishing Corporation Journal of Sensors Volume 2011, Article ID 581910, 12 pages doi:10.1155/2011/581910 Research Article Square Diaphragm CMUT Capacitance Calculation Using a New Deflection Shape Function Md Mosaddequr Rahman1 and Sazzadur Chowdhury2 1 Department of Electrical and Electronic Engineering, BRAC University, 66 Mohakhali, Dhaka 1212, Bangladesh 2 Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON, N9B 3P4, Canada Correspondence should be addressed to Md Mosaddequr Rahman, mdmosaddeq@ Received 8 June 2011; Accepted 21 July 2011 ¨ ˝ Academic Editor: Csaba Ducso Copyright © 2011 M. M. Rahman and S. Chowdhury. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. A new highly accurate closed-form capacitance calculation model has been developed to calculate the capacitance of capacitive micromachined ultrasonic transducers (CMUTs) built with square diaphragms. The model has been developed by using a two- dimensional polynomial function that more accurately predicts the deflection curve of a square diaphragm deformed under the influence of a uniform external pressure and also takes account of the fringing field capacitances. The model has been verified by comparing the model-predicted deflection profiles and capacitance values with experimental results published elsewhere and finite element analysis (FEA) carried out by the authors for different material properties, geometric specifications, and loading conditions. New model-calculated capacitance values are found to be in excellent agreement with published experiment