原创力文档high precision signal processing algorithm for white light interferometry白光干涉法的高精度信号处理算法.pdfVIP
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high precision signal processing algorithm for white light interferometry白光干涉法的高精度信号处理算法
Sensors 2008, 8, 7609-7635; DOI: 10.3390/s8127609
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
High Precision Signal Processing Algorithm for White Light
Interferometry
Jeonggon Harrison Kim *
Information and Communication Engineering Dept. Hansei University, 604-5 Dangjeong-dong
Gunpo-city Kyunggi-do, Korea
* Author to whom correspondence should be addressed; E-mail: jeongkim@hansei.ac.kr;
Tel.: 82-2-31-450-5174; Fax: 82-2-31-450-5172
Received: 22 April 2008; in revised form: 7 November 2008 / Accepted: 7 November 2008 /
Published: 1 December 2008
Abstract: A new signal processing algorithm for absolute temperature measurement using
white light interferometry has been proposed and investigated theoretically. The proposed
algorithm determines the phase delay of an interferometer with very high precision ( one
fringe) by identifying the zero order fringe peak of cross-correlation of two fringe scans of
white light interferometer. The algorithm features cross-correlation of interferometer fringe
scans, hypothesis testing and fine tuning. The hypothesis test looks for a zero order fringe
peak candidate about which the cross-correlation is symmetric minimizing the uncertainty
of mis-identification. Fine tuning provides the proposed algorithm with high precision sub-
sample resolution phase delay estimation capability. The shot noise limited performance of
the proposed algorithm has been analyzed using computer simulations. Root-mean-square
(RMS) phase error of the estimated zero
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