微电子机械系统下一波硅革命.pptVIP

* First generation inertial sensor – TRW Lucas Nova Sensor – 1987 Poppy seed is on top to show scale. Combined standard CMOS technology with MEMS fabrication MEMS-based systems answered the call of government regulated passive restraints in automobiles where these systems sensed rapid deceleration and in the event of a collision sent a signal to inflate rapidly an airbag. * First generation inertial sensor – TRW Lucas Nova Sensor – 1987 Poppy seed is on top to show scale. Combined standard CMOS technology with MEMS fabrication MEMS-based systems answered the call of government regulated pa