化学浴沉积ZnSe薄膜材料的结构和光学特性.docVIP

化学浴沉积ZnSe薄膜材料的结构和光 学特性 刘洁青姚朝腥徐鋭刘魏虹赵兴玲刘 云南师范大学可再生能源材料先进技术与制备教育 部重点实验室 采用化学浴沉积（CBD）制备不同膜厚的Zn Se薄膜，用扫描电子显微镜（SEM） 和X射线衍射（XRD）分析薄膜结构，结果显示薄膜为纳米晶立方相闪锌矿结构, 平均晶粒尺\T约为200 nm，结构致密，（111）晶面择优取向。使用分光光度计 测得薄膜透射谱与反射谱，计算和分析材料在可见光区域的吸收系数、消光系 数、折射率、光学能隙。结果表明，薄膜透过率、反射率均随膜厚的增加而降低， 薄膜在本征吸收区域吸收系数很大，且随波长的减小而增大。膜厚为150、400、 630 nm材料对应的光学能隙值分别为3. 16、3. 14、3. 07 e V。 关键词： 缓冲层;晒化锌;化学浴沉积;结构特性;光学特性; 2386650436@qq. 基金：国家白然科学基金 STRUCTURAL AND OPTICAL PROPERTIES OF ZnSe THIN FILMS FABRICATED BY CHEMICAL BATH DEPOSITION Liu Jieqing Yao Zhaohui Xu Rui Liu Jianhong Zhao Xingling Liu Xiaojiao Ministry ofEducation Key Laboratory of Advanced Technique Preparation for Renewable Energy Materials， Yunnan Normal University; Abstract： Zn Se nano-crystalline thin films with different thicknesses are grown by chemical bath deposition. SRM andXRD are used to investigate the structure properties. Results showed that thin films have zinc-blende structure with (111) preferred orientation and compact structure, mean grain size is around 200 nm. Transmission and reflectionspectrum of the films are also measured by spectrophotometer, optical properties like absorption coefficient, extinctioncoefficient, refraction index and the energy gaps arc calculated and analyzed in visible wavelength region. It is found thattransmittance and reflectance decrease with the increase of film thickness, absorption coefficient in intrinsic absorptionregion is very high and increases with the decrease of wavelength. Energy band gap values of 3. 16, 3- 14, 3. 07 e V areobtained when film thickness are 150, 400, 630 nm, respectively. Keyword： buffer layer; zinc selenide; chemical bath deposition; structural properties; optical properties; 0引言 目前铜铟镓硒(C1GS)及碲化镉(Cd Te)薄膜太阳电池器件结构中缓冲层材料 主要选择Cd S,但因镉有毒性问题，故无镉缓冲层材料的研究备受关注。日木 Shell采用Zn (0, S, 0H)、为缓冲层制作的CIGS太阳电池效率达13. 4%,创无 镉CIGS太阳电池效率的世界纪录XU。Zn Se (2. 70 e V)作为一种直接带隙半 导体材料，较Cd S (2.40 c V)有更宽的带隙，符合高效薄膜太阳电池对缓冲 层材料的设计要求，即与吸收层材料异质结能带匹配的前提下，因缓冲层材料 光生少子迁移率低，应尽可能选择吸收系数大的材料，使更多光子被吸收层吸 收，从而增大