《功能薄膜材料》课件PPT第8章3-化学气相沉积（CVD）.ppt

* P285 在薄膜制备上该工艺已逐渐被MOCVD取代。 * * 首先，热力学能判断反应是否能够进行；其次，热力学计算可以得到分压信息，和可逆反应的方向问题； 无法给出反应速率和薄膜沉积速率；有些反应是可以进行的，但由于速率问题并不一定实用，另外体系 一般是开放体系。一般的，CVD是经验科学，但是热力学可以作为准则。 但有的中间反应却要求反应速度尽可能快 * 标准图上找不到反应(1)的数据 * 实际情况是只有若干个反应是达到平衡，而其他反应没有达到平衡 * * 1500K时，HCl刻蚀Si * 1400K，Si/Cl比较小，表示固相中的Si比较多，沉积率比较高，再升高温度，Si/Cl变化不大，所以没有意义。 Equilibrium calculations offer a practical way to observe the effects of process variables, such as temperature and amounts of raw materials on product composition. With this program option you can calculate equilibrium composition and amounts of prevailing phases in any reactor. You only specify the raw material amounts, temperatures and the species of the system. These species can be specified by selecting the elements of the system, or typing the formulas, or by editing the old file. Activity coefficients can be given, if necessary, as constants or as functions of temperature and composition. Calculations can be repeated at stepwise intervals over the range of raw materials amounts or reaction temperatures in order to visualize the effect of these process variables. For example, you can observe the effect of temperature on arsenic evaporation from copper-iron sulfides, or the effect of chlorine feed on titanium chlorination. Equilibrium compositions are calculated using the Gibbs energy minimization method as soon as the user saves the input data by pressing the Save button. The results can raw material amount, temperature, then be presented graphically as a function of partial pressure, etc. You can select linear or logarithmic scale and set maximum and minimum values for the x- and y-axis. The tabular numerical data which is used to draw the diagram can be saved as a normal text file by pressing the Table button. These files can be read, for example, in spreadsheet programs for further calculations. A paper copy of the diagram can be obtained at the highest resolution of your Windows-supported printer by pressing the Print BW button. If you have a color prin