周期性纳米结构的空间光散射分布特性研究-光学工程专业论文.docxVIP

Research on Spatial Distribution of Light Scattering Cha racteristics of the Periodic Nano-structureDiscipline：Optical EngineeringStudent Signature：、 7G舢胁胁Supervisor Signa：AbstractThe periodic nano．structure iS formed on the surface of sapphire after ion etching．The research of spatial distribution of light scattering characteristics of the periodic nano-s缸uctIlre is important to improve the optical properties and guide the actual measurement．So the thesis focuses on the periodic nano．structure and mainly researches their geometrical S1：ructure and spatial distribution of light scattering．The thesis mainly discusses the advantages and disadvantages of six different calculationmethods of light scattering，sets up a reliable FEM-based analyzing model，and defines theparameters of the model，variable and boundary condition．In the end，spatial distribution oflim scattering of the periodic nano．structure is simulated for one dimensional and twodimensional．and tlle influence of different factors on Scattering distribution is analyzed．The main research work include the following．1、The validity of the modeling method is demonstrated through two practical calculationcases based on finite element method(FEM)，which fully shows that then study is reliable． 2、The one．dimensional periodic nano．s眦tLlre of TE and TM wave scattering fielddistribution characteristics is researched．When the incident Angle is close to 7t／5，the distribution of scattering field is circular for TE wave and fringe pattern for TM wave．Whenthe incident angle is close to 00 or兀／2，scattering field distribution of two wave is similar．At the same Angle of incidence，it can be arrived that the sum of the reflection coefficient and tr：Ⅱ塔mission coefficient is a fixed value．At the same time，analysis of the semicircle，triangle，rectangle of TE and TM wave scattering field distribution shows that the distribution of three万方数据kinds of shape is similar,but the electric field of rectangle，semicircle is larger and triangle is