磁通门传感器及其接口asic芯片分析-analysis of fluxgate sensor and its interface asic chip.docx

AbstractFluxgate magnetic sensor has become one of the most universal sensors in the field of weak magnetic measurement since appearance It has a high resolution up to 10-11T and the measurement scope can range from 10-11T to 10-3T with an excellent reliability. Moreover, the sensor can make direct measurement on magnetic field components. These distinguished characteristics make the fluxgate magnetic sensor much superior than traditional magnetic sensors like giant magneto-resistance,anisotropic magneto-resistance and Hall device. As micro-electronics technique and micro-mechanical technique advance, needs of micro sized magnetic sensors in aero and military fields becomes very urgent. This greats inspires the integration development for fluxgate sensors.Several issues are unavoidable in the process of fluxgate sensors’ miniaturization. The conflict between demands on high frequency drive for fluxgate and its consequent non-ideal influence stands out first. As the integrated fluxgate probe is limited by chip size and has low coil number and small transversal area, it requires high frequency drive for the core’s magnetic saturation. But high frequency also causes sensitivity decrease and noise property of integrated fluxgate core, which cannot be neglected. Besides, investigation on the effects of square wave excitation parameters on fluxgate core sensitivity is also very important, because square wave drive is the simplest and most common mode for sensors’ excitation. To address the above issues and in the meanwhile promote fluxgate sensors’ miniaturization, the influence of square wave excitation on sensor sensitivity, the equivalent electrical model for fluxgate sensor, and the interface ASIC development with key technics are studied in this dissertation.In the first part, the relationship of excitation voltage and fluxgate sensitivity under the square wave excitation is analyzed by reverse electrical potential principle and dynamic transfer function. I