微尺度特征结构上褶皱形貌的分析-analysis of wrinkle morphology on microscale feature structure.docxVIP

ABSTRACT Surface wrinkling covering on soft materials are of growing interest to a number of academic disciplines including soft lithography, metrology and flexible electronics. In this paper, to study how to control the morphology of the surface wrinkles, experiments and simulations have been done. There are three main aspects: controlling of the morphology of the surface wrinkling and the finite element analysis (FEA) of the wrinkle of thin film, fabrication of the micro-grooving structures and its FEA simulation, eliminating the ringing artefacts of the carbon nanotube probes of atomic force microscopy (AFM CNT probe) when detecting steep samples. By thermal deposition method, surface wrinkles on soft material were achieved. During successful experiments, grating-like wrinkles and zigzag wrinkles were successfully obtained. By observing the morphology of the wrinkles, it was found wrinkles around the circle structure and the direction of the circumference are mutually orthogonal; when near the groove structure, it was also found wrinkles and the edge of groove are perpendicular, and the wrinkles in the groove have a very good cycle stability and direction consistency. These results also illustrate that the wrinkles made by thermal deposition on the surface with characteristic structure are always perpendicular with the edge of the structure.Then the wrinkles of thin film were analysis by us by using buckling method. The wrinkle morphology of stretched film was simulated by nonlinear buckling method, and a method to calculate the surface wrinkle was put forward by us. By using the FEA software DEFORM, cutting progress was simulated in different cutting speed and different kinds of V-shaped micro-cutters. From several aspects, the burrs of different cutting parametersweresimulated;it was found that the increase of rake angle will get better surface quality. At last, the simulation results were compared with the experiment results. When the AFM CNT probes detect st