自动批量化mems加速度传感器测试装置设计分析-design and analysis of automatic batch mems acceleration sensor testing device.docxVIP

中北大学学位论文 万方数据 Automatic batch of MEMS Acceleration sensor design research and testing equipment Abstract An important part of a MEMS accelerometer MEMS inertial devices, has been widely used in automotive electronics, marine, office equipment, medical and other fields. In recent years with the development of smart phones, biomedical, machine monitoring and other industries, the market demand for MEMS acceleration sensor in every year. But before going into the market, the need for MEMS acceleration sensor calibration test of the performance indicators. At present, there is not yet able to achieve automatic batch MEMS accelerometer calibration of test equipment. This design study of an automated batch testing MEMS acceleration sensor device which can be implemented in accordance with the variable environment for MEMS acceleration sensor calibration and test various performance indicators. Firstly, by analyzing the MEMS acceleration sensor calibration and test several methods and principles, designed the overall organization of the test device. The test device consists of a static test part of the dynamic test section, PLC control system and PC software. Article use SolidWorks for 3D mechanical design software for the mechanical structure of the test apparatus will be a detailed design study. Mechanical design test apparatus includes an acceleration sensor carrier, roll drive mechanism, a horizontal drive mechanism, the drive mechanism and the vertical-lifting design automatic locking mechanism. Secondly, the paper designed to test the software and hardware devices were studied in detail. The hardware design of the test device including PLC controlled stepper motor servo circuit, photoelectric switch circuits, PLC and the computers serial communications, high-precision angle sensor line monitoring circuit design; software designed to test the device includes PLC control the main program, FX2N -20GM  positioning procedures, high-precision angle sensor line monitoring