二自由度大行程微定位平台设计与运动控制-机械工程专业论文.docxVIP

目录 中文摘要........................................................................................................................ I Abstract ......................................................................................................................... II HYPERLINK \l _bookmark0 目录..............................................................................................................................III HYPERLINK \l _bookmark1 图清单...........................................................................................................................V HYPERLINK \l _bookmark2 表清单........................................................................................................................ VII HYPERLINK \l _bookmark3 字母注释表...............................................................................................................VIII HYPERLINK \l _bookmark4 第一章 绪论..................................................................................................................1 HYPERLINK \l _bookmark5 1.1 课题研究背景与意义.....................................................................................1 HYPERLINK \l _bookmark6 1.2 微定位系统.....................................................................................................1 HYPERLINK \l _bookmark8 1.2.1 驱动器..................................................................................................2 HYPERLINK \l _bookmark10 1.2.2 传动机构..............................................................................................4 HYPERLINK \l _bookmark12 1.2.3 测量装置..............................................................................................5 HYPERLINK \l _bookmark14 1.2.4 控制系统..............................................................................................6 HYPERLINK \l _bookmark15 1.3 国内外研究现状.............................................................................................7 HYPERLINK \l _bookmark24 1.4 本文主要研究内容..........