传感器与作动器一体化的压电智能结构研究-机械电子工程专业论文.docxVIP

Abstract Piezoelectric smart structure(integrated with piezoelectric sensor and actuator) is a new structure which consists of a piezoelectric core element, a precision machinery support, and an integrated controller. It has a compact and highly integrated structure, and needs no external sensors and actuators. The integral structure is simple, easy to install, and flexible to apply. Piezoelectric smart structure is applied in isolation system, and it can reduce or even eliminate the environment vibration of the light precision equipment to improve the overall performance of precision equipment. Appropriate metal materials are chosen based on demand analysis of passive vibration isolation and piezoelectric smart plant. Peripheral precision mechanical structure is designed through theoretical calculation and finite element analysis, and its vertical stiffness is tested. The functional requirements of piezoelectric sensor and actuator are analyzed. Appropriate piezoelectric materials are chosen. And the structure and size of piezoelectric smart plant are designed. Theoretical study of piezoelectric sensors is conducted, and the experimental scheme is designed to calibrate its sensitivity. A modified Bouc-Wen model is proposed so as to improve the accuracy of model-based compensation control of piezoceramic actuators. The modified Bouc-Wen model is introduced by ameliorating shape control parameters to simulate the asymmetric hysteresis curve of piezoceramic actuator. The model parameters are identified by particle swarm optimization algorithm. Feedforward compensation control as well as feedforward plus PI feedback control based on the proposed model are carried out to investigate its effectiveness on improving the displacement output accuracy. The results indicate that, for the same control method, control by using the modified model can achieve higher trajectory tracking accuracy. A single support system model is established, and the transfer function is derived. A