单晶硅棒超声检测系统设计-精密仪器及机械专业论文.docx

西安理 西安理工大学硕士研究生学位论文 Abst Abstract PAGE PAGE VI III III Title: ULTRASONIC TESTING SYSTEM DESIGN OF MONOCRYSTALLINE SILICON ROD Major：Measurement Metrology Technology and Instrument Name：Jiaji Huang Signature: Supervisor：Prof. Zongming Qiu Signature: Abstract Along with the science and technology changing rapidly, the photovoltaic industry in our country is witnessing a fast development, monocrystalline silicon materials are also paid more and more attention. However, there are many uncertain factors during the preparation of the monocrystalline silicon, causing problems such as impurities, bubbles and other defects. In an attempt to protect the production equipment and improve the quality of finished silicon materials, it is very important to conduct non-destructive testing before the preparation of the monocrystalline silicon. By analyzing and comparing on the basis of practical problems, it has been concluded that ultrasonic detection method is the best one of the five conventional nondestructive testing technology. Because of the particularity of the monocrystalline silicon rod to general materials, this thesis chose to use the method of combination of ultrasonic transmission and reflection and use the method of circumference measurement in order to achieve the best results. In order to emerge the collected data in a more intuitive way， this thesis use the way of the polar coordinate imaging and three-dimensional reconstruction to display. This thesis`s main work are as follows； An introduction has been made about the subject background, ultrasonic nondestructive testing history, current situation and future development, and explain ultrasonic detection of non-metallic material. There is no report about the ultrasonic nondestructive testing of monocrystalline silicon rod currently in our country. Some research has been made about the feature amount and propagation characteristics of ultrasonic wave, and an introduction is made about the special nature of mo