非接触多维微小位移测量-电路与系统专业论文.docxVIP

II II ABSTRACT Measurement of small displacement is divided into contact and non-contact two types at present. The representatives of contact are ICP vortex displacement sensor, fiber grating displacement sensors Etc. Its characteristics are measured stable and reliable. However, the measurement process need to install a sensor on the tested objects. So it can only be used in the actual use of a relatively fixed occasions. The representative of non-contact type is laser Measurement. Its biggest advantage is non-contact measurement and high precision measurement. But it also have lots shor