锆钛酸铅pzt陶瓷材料相关技术与应用研究精密仪器及机械专业论文.docxVIP

摘要针对目前压电微泵驱动电压普遍较高、不易于批量制造等局限，提出制作在较 摘要 针对目前压电微泵驱动电压普遍较高、不易于批量制造等局限，提出制作在较 低驱动电压下有较高驱动能力且响应频率高的PZT厚膜驱动器。在分析压电膜 片驱动原理以及收缩／扩散口模型的基础上，设计、制作了PZT压电层厚度40urn 的膜片式驱动器，并将其用于无阀微泵测试。测试表明，驱动器具有高的谐振 频率(29KHz)和较强的驱动能力(30Vpp-3．6urn)，在高性能微泵中有广泛的 应用前景。 3．利用飞秒激光加工技术实现对PZT陶瓷的烧蚀及图形化。 飞秒激光加工技术作为一种高精度的无掩模加工技术，具有真三维、亚微 米级分辨率、热影响小等优点，在微细加工领域应用越来越广泛。飞秒激光具 有超短的脉冲时间(100fs)、超强的功率密度(1014W／cm2以上)，能够激发材 料的双光子／多光子吸收效应，所以可以用来高精度的加工几乎所有类型的材 料。本文中以飞秒激光烧蚀材料的阂值模型作为理论基础，利用烧蚀加工孔径 大小与能量密度的相互关系进行PZT烧蚀阈值的研究，通过毫焦(InJ)能量飞 秒激光脉冲成功实现对PZT陶瓷的烧蚀，并在此基础上，以适当功率和扫描参 数飞秒激光实现对PZT压电厚膜驱动进行了图形化研究。通过对实验结果的测 试、分析可以得出，飞秒激光加工技术能够满足对PZT陶瓷的高精度、高效率 的图形化要求。 关键词：PZT陶瓷ITO飞秒激光图形化微泵驱动器 Ⅱ 摘要ABSTRACT 摘要 ABSTRACT Along with the fast development，better and better market price of the Microelectromechanical system(MEMS)，MEMS productions are required to be more reliable，economical and efficient；SO，it puts forword more and more requirement for the capability of the material used in MEMS；at the some tinle．tlle precision and efficency of the micromachining methods is required to be batter and batter．PZT is one of the most useful functional materials，it is not only used as excellent driven material，also as sensitive transducer material．PZT also has potential application in the field of micro-electronics and photoelectron for its excellent ferroelectric capability．At present，more and more PZT preparation methods are developed，SO more and more productions based on PZT are fabricated． But,there are also some problems that limit its application．For example，in the sol-gel preparation process，Pt bottom electrode has the problem of compatibility and fatigue properties，and the thermal annealing process is time．consuming；it is difficult to get PZT film more than 1 0urn，also the micromachnining of PZT thick film iS di伍cult． Aim at some problems of PZT preparation and micromachnining，the main research contents of the dissertation are： 1．Fast preparation of high performance PZT film on ITO bottom electrode． ITO has hish conductivity and high transparency i