ecr离子源主要参数对离子束流影响的研究等离子体物理专业论文.docxVIP

ABSTRACTABSTRACT ABSTRACT ABSTRACT Without cathode，ECR ion resource Call work steadily for very long time谢m stronger ion current，stable performance，corrosion resistance and lower pressure． therefore,ECR has been widely applied in many fields．At present,there is a high-yield neutron generator which adopts ECR ion resource． Due to complex experimental device structure，measurement of dynamic parameters of ECR ion resourco is very difficult．At the same lime，these parameters influence each oilier．Preliminary experiments have been proved that these factors affect the size and stability of beam seriously,eVell lead to rio generation of beam of the ECR ion SOUlCe．In this paper,based Oil the preliminary experiments，part of component s of ECR ion S01JIce has been improved，main parameters such as microwave power,gas pressure，magnetic field，plasma density,beam intensity has been measured．Using the rule which is obtained by researching the relationship between main parameters and ion current，working state of ECR ion SOUrCe have been adjusted and acquire stable， high-intensity,good quality ion beam．The main work and achievements of this thesis ale as follows： It is a brief introduction about principle of electron cyclotron resonlttlce，working principle and experimental device sla-ucture of ECR ion source and generated forms of low—temperature plasma． Rectangular waveguide transition and microwave input window are analyzed and simulated，which ale belong to main structure of microwave transmission of ECR ion $ollre宅．The thickness of the microwave input window and magnetic mirror structure of the ECR ion source have been improved．Vacuum system and the automatic control system of the ECR ion source have been analyzed． The methods of test have been analyzed，which is used to lllca．．qure microwave power,gas pressure，the discharge chamber magnetic field,ion beam．An initial diagnosis to measure the density of ECR ion has been finished by using Langrnuir Probe(with Launch probe and single